Immersion lithography uses this principle and achieves a higher resolving power by filling the space between the projection lens and the wafer with purified ...
2022年10月26日 — Immersion lithography derives from immersion microscopy. It is an old technique that dates back to the 1840s, when microscoper Giovanni Battista ...
Immersion systems are the workhorses of the industry. Our latest NXT machines have shown the ability to run in excess of 6,000 wafers per day, with an average ...
由 CA Mack 著作 · 2006 · 被引用 178 次 — Immersion lithography is now in use and is expected to allow lenses to be made with numerical apertures greater than 1.0. Lenses with NAs above 1.2 or 1.3 seem ...
由 林育詩 著作 · 2008 — Thus, the immersion technique is being used in modern lithography for the 65-, 45-, and 32-nm nodes. Key words: Immersion lithography, Semiconductor ...
